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Date: 2013-01-06 22:10:49CL2 Technology Semiconductor device fabrication Microtechnology Etching | Cr Etching at the UCSB Nanofabrication Facility Panasonic E640 ICP Etcher Panasonic E640 ICP Etcher • Multi-Purpose ICP etcherAdd to Reading ListSource URL: www.nanotech.ucsb.eduDownload Document from Source WebsiteFile Size: 437,35 KBShare Document on Facebook |
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