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CL2 / Technology / Semiconductor device fabrication / Microtechnology / Etching


Cr Etching at the UCSB Nanofabrication Facility Panasonic E640 ICP Etcher Panasonic E640 ICP Etcher • Multi-Purpose ICP etcher
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Document Date: 2013-01-06 22:10:49


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Company

Panasonic / /

Currency

CHF / /

IndustryTerm

silicon carrier wafers / /

Person

B. Mitchell Cr Etch / /

Position

RT / /

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