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Cr Etching at the UCSB Nanofabrication Facility Panasonic E640 ICP Etcher Panasonic E640 ICP Etcher • Multi-Purpose ICP etcher
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Document Date: 2013-01-06 22:10:49
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File Size: 437,35 KB
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Company
Panasonic /
/
Currency
CHF /
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IndustryTerm
silicon carrier wafers /
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Person
B. Mitchell Cr Etch /
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Position
RT /
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SocialTag
CL2
Technology
Semiconductor device fabrication
Microtechnology
Etching