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	3D tactile sensor for nanometrology E.J.C. Bos Eindhoven University of Technology, Department of Mechanical Engineering, Section Micro and Nanoscale Engineering, P.O. Box 513, NL 5600 MB Eindhoven phone + Add to Reading List Document Date: 2006-01-25 09:02:45 Open Document File Size: 179,66 KB Share Result on Facebook

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3D tactile sensor for nanometrology E.J.C. Bos Eindhoven University of Technology, Department of Mechanical Engineering, Section Micro and Nanoscale Engineering, P.O. Box 513, NL 5600 MB Eindhoven phone +Add to Reading List