Microelectronic Engineering[removed]–130 www.elsevier.com locate mee The use of numerical simulation to predict the unlocking stress of dislocations in Cz-silicon wafers a, - Process simulation - Document - PDFSEARCH.IO

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Date: 2007-07-29 11:21:42 Deformation Dislocation Plasticity Solid mechanics Wafer Czochralski process Annealing Rapid thermal processing Hardening Materials science Semiconductor device fabrication Crystallographic defects		Microelectronic Engineering[removed]–130 www.elsevier.com / locate / mee The use of numerical simulation to predict the unlocking stress of dislocations in Cz-silicon wafers a, Add to Reading List Source URL: www.webalice.it Download Document from Source Website File Size: 142,82 KB Share Document on Facebook

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