![Deformation / Dislocation / Plasticity / Solid mechanics / Wafer / Czochralski process / Annealing / Rapid thermal processing / Hardening / Materials science / Semiconductor device fabrication / Crystallographic defects Deformation / Dislocation / Plasticity / Solid mechanics / Wafer / Czochralski process / Annealing / Rapid thermal processing / Hardening / Materials science / Semiconductor device fabrication / Crystallographic defects](https://www.pdfsearch.io/img/a3621a410f0c7714fe3256e99b532197.jpg) Date: 2007-07-29 11:21:42Deformation Dislocation Plasticity Solid mechanics Wafer Czochralski process Annealing Rapid thermal processing Hardening Materials science Semiconductor device fabrication Crystallographic defects | | Microelectronic Engineering[removed]–130 www.elsevier.com / locate / mee The use of numerical simulation to predict the unlocking stress of dislocations in Cz-silicon wafers a,Add to Reading ListSource URL: www.webalice.itDownload Document from Source Website File Size: 142,82 KBShare Document on Facebook
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