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Deformation / Dislocation / Plasticity / Solid mechanics / Wafer / Czochralski process / Annealing / Rapid thermal processing / Hardening / Materials science / Semiconductor device fabrication / Crystallographic defects


Microelectronic Engineering[removed]–130 www.elsevier.com / locate / mee The use of numerical simulation to predict the unlocking stress of dislocations in Cz-silicon wafers a,
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Document Date: 2007-07-29 11:21:42

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City

Novara / /

Company

Shimizu / Elsevier B.V. / MEMC Electronic Materials SpA / /

Country

United Kingdom / /

Currency

pence / AED / /

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Facility

University of Oxford / /

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IndustryTerm

device processing / energy barrier / reduced energy sites / free energy / energy / /

Organization

Department of Materials / University of Oxford / /

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Position

integrated circuits *Corresponding author / /

Technology

semiconductor / simulation / process control / integrated circuits / integrated circuit / /

URL

www.elsevier.com / /

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