![Thin film deposition / Aluminium nitride / Coatings / Materials science / Sputter deposition / Sputtering / Lattice constant / Thin film / Layer / Chemistry / Semiconductor device fabrication / Nitrides Thin film deposition / Aluminium nitride / Coatings / Materials science / Sputter deposition / Sputtering / Lattice constant / Thin film / Layer / Chemistry / Semiconductor device fabrication / Nitrides](https://www.pdfsearch.io/img/4393b8584119f0fbd08052787b8ecb1c.jpg) Date: 2009-06-22 00:36:45Thin film deposition Aluminium nitride Coatings Materials science Sputter deposition Sputtering Lattice constant Thin film Layer Chemistry Semiconductor device fabrication Nitrides | | 2009 June 18 ISEC Improvement of Critical Temperature of Superconducting NbN and NbTiN Thin Films Using an AlN Buffer Layer T. Shiino1, K. Todoroki1, N. D. Minh1, L. Jiang1, S. Shiba1, Y. Uzawa2, H. Maezawa3, N. Sakai1 Add to Reading ListSource URL: www.resceu.s.u-tokyo.ac.jpDownload Document from Source Website File Size: 1,83 MBShare Document on Facebook
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