2009 June 18 ISEC Improvement of Critical Temperature of Superconducting NbN and NbTiN Thin Films Using an AlN Buffer Layer T. Shiino1, K. Todoroki1, N. D. Minh1, L. Jiang1, S. Shiba1, Y. Uzawa2, H. Maezawa3, N. Sakai1

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Date: 2009-06-22 00:36:45 Thin film deposition Aluminium nitride Coatings Materials science Sputter deposition Sputtering Lattice constant Thin film Layer Chemistry Semiconductor device fabrication Nitrides		2009 June 18 ISEC Improvement of Critical Temperature of Superconducting NbN and NbTiN Thin Films Using an AlN Buffer Layer T. Shiino1, K. Todoroki1, N. D. Minh1, L. Jiang1, S. Shiba1, Y. Uzawa2, H. Maezawa3, N. Sakai1 Add to Reading List Source URL: www.resceu.s.u-tokyo.ac.jp Download Document from Source Website File Size: 1,83 MB Share Document on Facebook

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