![Thin film deposition / Aluminium nitride / Coatings / Materials science / Sputter deposition / Sputtering / Lattice constant / Thin film / Layer / Chemistry / Semiconductor device fabrication / Nitrides Thin film deposition / Aluminium nitride / Coatings / Materials science / Sputter deposition / Sputtering / Lattice constant / Thin film / Layer / Chemistry / Semiconductor device fabrication / Nitrides](https://www.pdfsearch.io/img/4393b8584119f0fbd08052787b8ecb1c.jpg)
| Document Date: 2009-06-22 00:36:45 Open Document File Size: 1,83 MBShare Result on Facebook
Company APL / / Country Japan / / / Facility University of Tokyo / National Astronomical Observatory of Japan / / Organization University of Tokyo / Nagoya University / / Person Masanori Takeda / / Region Eastern Asia / / Technology X-ray / /
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