Mode Note Scanning Capacitance Microscopy (SCM) High Resolution and High Sensitivity Imaging of Charge Distribution Characterization of Semiconductor Device with Non-Destructive Technique and High Spatial Resolution - Scanning capacitance microscopy - Document - PDFSEARCH.IO

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	Mode Note Scanning Capacitance Microscopy (SCM) High Resolution and High Sensitivity Imaging of Charge Distribution Characterization of Semiconductor Device with Non-Destructive Technique and High Spatial Resolution Add to Reading List Document Date: 2009-12-27 18:00:00 Open Document File Size: 904,57 KB Share Result on Facebook IndustryTerm metal-oxide-semiconductor field effect transistor / direct imaging / carrier concentration information / carrier concentration / characterization tools / keV energy / semiconductor device / conventional tools / sample imaging / conductive metal probe tip / twodimensional activated carrier concentration / imaging / semiconductor devices / Low carrier concentration / / OperatingSystem MNOS / / Person Ion Mass Spectroscopy / / Position semi-conductor / / ProgrammingLanguage DC / / Technology semiconductor / radiation / microwave / semiconductors / S/N / semiconductor devices / dielectric / / URL www.parkAFM.com / / SocialTag Physics Technology MOSFET Capacitance Depletion region Diode P–n junction Capacitor Field-effect transistor Scanning probe microscopy

Mode Note Scanning Capacitance Microscopy (SCM) High Resolution and High Sensitivity Imaging of Charge Distribution Characterization of Semiconductor Device with Non-Destructive Technique and High Spatial ResolutionAdd to Reading List