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Electron microscopy / Semiconductor device fabrication / Thin film deposition / Microtechnology / Focused ion beam / Ion beam / Microelectromechanical systems / Scanning electron microscope / Nanotechnology / Physics / Scientific method / Science


NanoTech1401002AgeevILO.fm
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Document Date: 2015-01-20 05:11:10


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City

Moscow / /

Company

Pleiades Publishing Ltd. / FEI Company / V. A. Smirnov A. S. / B.G. Konoplev S.A. / A.L. Gromov A.S. / O. A. Ageev A. S. / A. L. Gromova A. S. / M. V. Stepikhova N. V. / /

Country

Russia / United Kingdom / /

/

Facility

University Avenue / Southern Federal University / University of Glasgow / S. A. Lisitsyna aSouthern Federal University / /

IndustryTerm

digital image processing techniques / micro electronic devices / system management software / nanosys tem equipment / electronic devices / maximum energy / manufacturing / nanosystem technology / ion beam technology / micro and nanoelectromechanical systems / energy / /

Organization

S. A. Lisitsyna aSouthern Federal University / Kelvin Nanocharacterisation Centre / Department of Electronics and Instrumentation / Southern Federal University / Russia School of Physics and Astronomy / University of Glasgow / /

Person

Ion Beams / M. A. Kuznetsova / V / Z. F. Krasil’nik / V / Nova NanoLab / /

Technology

MEMS / ion beam technology / ASCII / nanosystem technology / image processing / /

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