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Semiconductor growth / Physics / Crystallography / Mineralogy / Materials science / Czochralski process / Silicon carbide / Crystal growth / Ingot / Chemistry / Crystals / Matter
Date: 2013-10-16 08:49:45
Semiconductor growth
Physics
Crystallography
Mineralogy
Materials science
Czochralski process
Silicon carbide
Crystal growth
Ingot
Chemistry
Crystals
Matter

XIII International Autunmn Meeting “Gettering and defect engineering in Semi­conductor Technology”, GADEST 2009 September 26 – October 02, 2009, Döllnsee­Schorfheide, Germany Optimization  of

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