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Coatings / Materials science / Ultraviolet radiation / Zinc oxide / Cathodic arc deposition / Physical vapor deposition / Sputter deposition / Pulsed laser deposition / Sputtering / Chemistry / Thin film deposition / Semiconductor device fabrication


LBNL-5585E Achieving high mobility ZnO:Al at very high growth rates by dc filtered cathodic arc deposition R. Mendelsberg
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Document Date: 2014-12-11 20:16:39


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City

Springer / /

Company

Solid-State Electronics / Renewable Energy / X. L. Xu S. P. / CA 2 Lawrence Berkeley National Laboratory / Lawrence Berkeley National Laboratory / H. W. Lee S. P. / Thin Solid Films / Y. G. Wang S. P. / /

Country

United States / /

Currency

USD / /

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Facility

Harbin Institute of Technology / Lim Lawrence Berkeley National Laboratory Y.K. Zhu Lawrence Berkeley National Laboratory Harbin Institute of Technology / Molecular Foundry / LBNL Molecular Foundry / Building Technologies / University of California / /

IndustryTerm

vacuum applications / low carrier concentration / metal oxide / beroptic communications / kinetic and potential energy / high carrier concentration / electrode applications / energy / low-energy constricted-plasma source / large area applications / optoelectronic devices / kinetic energy / important applications / plasma-emission control systems / potential energy / energy efficiency / high kinetic energy / Oxygen gas / /

NaturalFeature

mT. Anodefilter / /

Organization

University of California / U.S. Department of Energy / Harbin Institute of Technology / Harbin / office of Basic Energy Sciences Early Career Research Program / office of Science / United States Government / office of Building Technologies / US Federal Reserve / Urban Systems Department Environmental Energy Technologies Division / office of Basic Energy Sciences / /

Person

J. Brown / Ryuichi Miyano / Tatsuhiko Matsushita / Milliron Lawrence Berkeley / Tomoaki Ikegami / Masahiro Okuda / H. N. Lim / Takanori Aoki / Nobuto Oka / Fumiaki Mitsugi / Yasutaka Nishi / Naoki Tsukamoto / Hirofumi Takikawa / K. M. Yu / Tateki Sakakibara / Yuzo Shigesato / Keisaku Kimura / Yoshihiro Umeda / H. Y. Liu / V / Yasushi Sato / H. von Wenckstern / V / M. McFarland / A. Anders Lawrence Berkeley / Lawrence Berkeley / M. Kuhn / Norihiro Sakai / J. Andersson / Xiang Li / J. Rosen / D.J. Milliron / Hideaki Agura / Isao Yamamoto / Jianguo Lu / Yuan Kun / Akio Suzuki / /

Position

RT / D.J. / Assistant Secretary / /

ProvinceOrState

New York / California / /

PublishedMedium

Journal of Physics D / /

Technology

laser / condensation / spectroscopy / /

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