FractureGate: Fracture Fabrication of Single Crystal Silicon Nanosurfaces Alexander D. Sprunt - Slocum - Document - PDFSEARCH.IO

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$Mechanics / Semiconductor device fabrication / Glass physics / Fracture / Microelectromechanical systems / Bone fracture / Deep reactive-ion etching / Materials science / Physics / Microtechnology$	FractureGate: Fracture Fabrication of Single Crystal Silicon Nanosurfaces Alexander D. Sprunt & Alexander H. Slocum MIT Mechanical Engineering – Precision Engineering Research Group Room 3-470, 77 Massachusetts Avenue, Add to Reading List Document Date: 2011-12-13 18:50:17 Open Document File Size: 2,31 MB Share Result on Facebook Company Molecular Machines Group / MIT’s Microsystems Technology Laboratory / Gap / / / / IndustryTerm storage applications / / OperatingSystem Fork / / Organization Center for Bits and Atoms / Deshpande Center for Technological Innovation / MIT Media Lab / National Science Foundation / MIT / / Person Jacob N. Israelachvili / Patricia M. McGuiggan / Joachim Sihler / Jian Li / Casimir Force / Alexander D. Sprunt / Alexander H. Slocum / / / Technology flow control / / SocialTag Mechanics Semiconductor device fabrication Glass physics Fracture Microelectromechanical systems Bone fracture Deep reactive-ion etching Materials science Physics Microtechnology

FractureGate: Fracture Fabrication of Single Crystal Silicon Nanosurfaces Alexander D. Sprunt & Alexander H. Slocum MIT Mechanical Engineering – Precision Engineering Research Group Room 3-470, 77 Massachusetts Avenue,Add to Reading List