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Technology / Silicon on insulator / Thermal oxidation / Ion implantation / Wafer / Microelectromechanical systems / Silicon on sapphire / Smart Cut / Epitaxy / Semiconductor device fabrication / Materials science / Microtechnology
Date: 2010-12-09 11:08:13
Technology
Silicon on insulator
Thermal oxidation
Ion implantation
Wafer
Microelectromechanical systems
Silicon on sapphire
Smart Cut
Epitaxy
Semiconductor device fabrication
Materials science
Microtechnology

JOURNAL OF APPLIED PHYSICS VOLUME 93, NUMBER 9

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