American Institute of Physics Downloaded / Sorin Cristoloveanu Institute of Microelectronics / Therefore building / American Institute of Physics / /
IndustryTerm
keV ion energy / conventional equipment / bond energy peaks / surface bond energy / molecular hydrogen gas / bond surface energy / niche applications / noble gas ions / high temperature chemical vapor deposition / microphotonic chips / implantation energy leads / ion energy / micro-electro-mechanical systems / energy / metal / revolutionized electronics / gas ions / bond energy / electronic applications / actual bond energy / device processing / chemical thinning / ion implantation energy / chemical oxide / device applications / semiconductor electronics / active devices / voltage devices / /
Organization
American Institute of Physics Downloaded / American Institute of Physics / Material Research Society / Electrochemical Society / Sorin Cristoloveanu Institute of Microelectronics / Electromagnetism and Photonics / /
Person
Wafer Bonding / /
ProvinceOrState
Massachusetts / /
Technology
semiconductor / alpha / radiation / SOI technology / lithography / random access / integrated circuits / same chip / chemical vapor deposition / laser / MEMS / semiconductors / internal oxidation With SIMOX technology / Si technology / dielectric / crystallization / spectroscopy / two technologies / CVD / technology of wafer bonding / integrated circuit / /
JOURNAL OF APPLIED PHYSICS VOLUME 93, NUMBER 9