340 IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, VOL. 17, NO. 2, MARCH 2009 Adaptive Control of Electrostatic Microactuators With Bidirectional Drive

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• Backstepping
• Adaptive control
• Nonlinear control
• Feedback
• Strict-feedback form
• Open-loop controller
• Control system
• Control theory
• Systems theory
• Cybernetics