![Chemistry / Technology / Etching / Tetramethylammonium hydroxide / Carbon nanotube / Wafer / Thermal oxidation / Photoresist / Microelectromechanical systems / Materials science / Semiconductor device fabrication / Microtechnology Chemistry / Technology / Etching / Tetramethylammonium hydroxide / Carbon nanotube / Wafer / Thermal oxidation / Photoresist / Microelectromechanical systems / Materials science / Semiconductor device fabrication / Microtechnology](https://www.pdfsearch.io/img/b32b225e21dfdeb0b1323a437f560aed.jpg)
| Document Date: 2011-12-13 18:50:30 Open Document File Size: 2,54 MBShare Result on Facebook
/ IndustryTerm nm-sized metal particles / steel / / Organization Massachusetts Institute of Technology / Jaime Werkmeister Precision Engineering Research Group Department / / Person Alex Sprunt / Alexander H. Slocum John Hart / Jaime Werkmeister / / Technology Radio Frequency / / URL http /
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