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| Document Date: 2015-03-03 22:03:52 Open Document File Size: 26,80 KBShare Result on Facebook
City Zurich / / Company IBM / / IndustryTerm probe technology / metrology systems / computer chips / characterization tools / technology nodes / nanoscale devices / manufacturing / industrial applications / possible applications / generation chips / / Person Mark Lantz / Bernd Gotsmann / / Position record player / scientist / / PublishedMedium Nature Nanotechnology / / Technology semiconductor / computer chips / generation chips / scanning probe technology / probe-based technologies / / URL www.tcpdf.org / http /
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