Fraunhofer Institute of Integrated Systems / The Fraunhofer Institute of Integrated Systems / Erlangen station / From Erlangen station / / /
IndustryTerm
metal / semiconductor technology / gas enhancend etching cut / electron beam processing / manufacturing equipment / metal line / semiconductor processing / processes and equipment / high resolution secondary electron imaging / power electronics / buried metal lines / metal lines / train services / /
Organization
Universität Südgelände / Fraunhofer Institute of Integrated Systems and Device Technology / Institute of Integrated Systems and Device Technology / Fraunhofer Institute of Integrated Systems / Fraunhofer-Institut für Integrierte Systeme / /
Person
Ion Beam / Mathias Rommel / / /
Technology
semiconductor / processes and equipment / Ion Beam Technology / semiconductors / semiconductor technology / lithography / simulation / Process control / integrated circuit / /