P I L K I N G T O N T E C H N O L O G Y D ATA S H E E T COATING TECHNOLOGY – PROCESSES Magnetron Sputtering The invention of “planar magnetrons” in 1971 allowed coatings to be sputtered in vacuum at much higher ra - Vacuum deposition - Document - PDFSEARCH.IO

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Date: 2014-02-18 06:28:01 Coatings Plasma processing Manufacturing Technology Materials science Sputter deposition Physical vapor deposition Chemical vapor deposition Sputtering Thin film deposition Chemistry Semiconductor device fabrication		P I L K I N G T O N T E C H N O L O G Y D ATA S H E E T COATING TECHNOLOGY – PROCESSES Magnetron Sputtering The invention of “planar magnetrons” in 1971 allowed coatings to be sputtered in vacuum at much higher ra Add to Reading List Source URL: www.pilkington.com Download Document from Source Website File Size: 464,28 KB Share Document on Facebook

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