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Chemistry / Coatings / Manufacturing / Vacuum / Plasma processing / Physical vapor deposition / Vacuum deposition / Ion plating / Sputter deposition / Thin film deposition / Technology / Semiconductor device fabrication


The Foundations of Vacuum Coating Technology The Foundations of
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Document Date: 2012-06-14 11:55:36


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City

New York / Norwich / /

Company

National Research Corporation / William Andrew Publishing / 1987 Applied Materials Inc. / GE / MKS Corporation / Consolidated Vacuum Corp. / Technology Donald M. Mattox Management Plus Inc. / DuPont / Distillation Products Inc. / Varian Corp. / Pfeiffer Corp. / William Andrew Inc. / Metallic Fluoride Reflection Reducing Films / /

Continent

Europe / /

Country

Germany / Norway / United States / India / /

/

Facility

Library of Congress Cataloging-in-Publication Data Mattox / Plastics Design Library / William Andrew Publishing Library of Congress Catalog Card Number / /

/

IndustryTerm

plasma technology / vacuum coating processing / Metal coating / gas composition / reactive gas / control gas flow / oil diffusion pump / metal oil diffusion pump / gas particle density / vacuum coating technology / chemical vapor deposition / gas density / semiconductor processing / oil-free pumping systems / rubber / chemical vapor precursors / paint / recent applications / hybrid processing / vacuum equipment / rubber tree sap / chemical vapor precursor / strip metal / vacuum technology / oil-sealed rotary vane mechanical pump / paint industry / large vacuum coating systems / tribological applications / thin metal foils / electricity / gas pressures / low-vapor pressure oil / excess paint / gas manifolding / vacuum systems / cluster tool / cluster tool systems / mining / early applications / oil contamination / corrosive processing gases / sub-atmospheric gas density / /

Organization

Congress / U.S. Patent Office / United States Army / /

Person

Don Mattox / Ion Plating / Fred Wehner / Otto von Guericke / Bob Cormia / Phil Baumeister / C.F. Powell / Lindsey / Collin Alexander / Angus Macleod / Julie Romig / Russ Hill / J.H. Oxley / Leslie Holland / Julie Filatoff / Linnea Dueker / Vivienne / Jim Lafferty / Bob Waits / Brent Beckley / Donald M. Mattox / Thomas Edison / J.M. Blocher / Jr. / /

/

Position

General / historian / Dedication The author / author / Acknowledgments The author / /

ProvinceOrState

New York / /

Region

Southeast Asia / /

Technology

semiconductor / vacuum technology / vacuum coating technology / Chemical Vapor Deposition / condensation / spectroscopy / plasma technology / CVD / integrated circuit / /

URL

www.williamandrew.com / www.knovel.com / www.svc.org / www.svc.org/H/H_OralInterviews.html / /

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