JOURNAL OF APPLIED PHYSICS VOLUME 92, NUMBER 8 15 OCTOBER 2002

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Date: 2007-07-14 19:13:41 Technology Chemical vapor deposition Coatings Plasma processing Semiconductor device fabrication Thin film deposition Wire Pressure measurement Field electron emission Vacuum Physics Measurement		JOURNAL OF APPLIED PHYSICS VOLUME 92, NUMBER 8 15 OCTOBER 2002 Add to Reading List Source URL: daedalus.caltech.edu Download Document from Source Website File Size: 282,50 KB Share Document on Facebook

	Stability of extreme ultraviolet multilayer coatings to low energy proton bombardment M.G. Pelizzo,1,2,* Alain Jody Corso,1,2 Paola Zuppella,1,2 D.L. Windt,3 G. Mattei,4 P. Nicolosi1,2 1 DocID: 1vkNm - View Document
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	COATINGS Training course 09 – 13 July Location: Contact: DocID: 1uG6N - View Document