Combinatorial Multilevel Mold Insert Using Micromachining and X-ray Lithography V. Singh1, J. Goettert1, O. Jinka1,2,* 1 Center for Advanced Microstructures and Devices (CAMD)

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Date: 2012-07-31 11:19:10 Chemistry Microtechnology Materials science Polymers LIGA Semiconductor device fabrication Microelectromechanical systems Photoresist Photolithography SU-8 photoresist Poly Resist		Combinatorial Multilevel Mold Insert Using Micromachining and X-ray Lithography V. Singh1, J. Goettert1, O. Jinka1,2,* 1 Center for Advanced Microstructures and Devices (CAMD) Add to Reading List Source URL: www.camd.lsu.edu Download Document from Source Website File Size: 1,32 MB Share Document on Facebook

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