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Electronics manufacturing / Wafer bonding / Semiconductor device fabrication / Wafer / Direct bonding / Anodic bonding / Microtechnology / Electronics / Technology


SEMI-FINISHED BONDED SUBSTRATES CONSISTING OF LITHIUMTANTALATE AND SILICON Silicon
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Document Date: 2015-01-15 14:05:56

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Facility

Contact Materials Fraunhofer Institute / /

Organization

SEMI / Contact Materials Fraunhofer Institute for Electronic Fraunhofer ENAS / /

Person

SEMI-FINISHED BONDED SUBSTRATES CONSISTING / Dirk Wuensch / Maik Wiemer / /

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Technology

Dielectric / /

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