227 Introduction to Micro-Electro-Mechanical Systems (MEMS)

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Date: 2003-02-18 23:39:28 Microelectromechanical systems Micro-Opto-Electro-Mechanical Systems Deformable mirror Microfabrication Surface micromachining Micromachinery Bulk micromachining Beam steering Microlens Microtechnology Materials science Technology		227 Introduction to Micro-Electro-Mechanical Systems (MEMS) Add to Reading List Source URL: www.nectec.or.th Download Document from Source Website File Size: 1,46 MB Share Document on Facebook

	Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication DocID: 1spah - View Document
	“Microfabrication Techniques: the Route from Hard 2D to Soft 3D Devices” Dr. Seyedhamidreza Alaie Department of Radiology, Weill Cornell Medicine, New York, NY Monday August 15, a.m.) at UNM Center for High DocID: 1rIlo - View Document
	Microfabrication Project Proposal Form Principle Investigator: (Person responsible for project) Name: ____________________________________ ________ Department: _____________________ _________________ __ E-Mail Addr DocID: 1qYm7 - View Document
	Origami MEMS and NEMS John Rogers, Yonggang Huang, Oliver G. Schmidt, and David H. Gracias In a manner reminiscent of macroscale bending and folding techniques such as origami, the out-of-plane assembly of lithographical DocID: 1qAJK - View Document
	High-sensitivity microfluidic calorimeters for biological and chemical applications Wonhee Lee, Warren Fon, Blake W. Axelrod, and Michael L. Roukes1 Kavli Nanoscience Institute, California Institute of Technology, Pasade DocID: 1qtxJ - View Document