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227 Introduction to Micro-Electro-Mechanical Systems (MEMS)
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Document Date: 2003-02-18 23:39:28


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File Size: 1,46 MB

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City

Bangkok / New York / Washington / D.C. / /

Company

Advanced Manufacturing / Analog Devices / CRC Press / Ansys / Digital Electronics / National Academic Press / Micro-Electro-Mechanical System Laboratory / Micro-Electro-Mechanical Systems / Texas Instrument / /

Country

Thailand / United States / /

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Facility

King Mongkut Institute of Technology Ladkrabang / Optoelectronic Computing Systems Center / University of Colorado / /

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IndustryTerm

design verification tools / microsystem technology / miniature systems / gas composition / microopto-electro-mechanical systems / software tools / communication systems / layout tool / electrostatic actuated devices / suitable applications / gas/chemical sensor / display systems / optical systems / free space optical communication systems / signal processing / biomedical technologies / micro-optics applications / micro-electromechanical systems / software packages / chemical etchant dissolving / electro-magnetic systems / batch processing techniques / energy / microelectronics technology / mechanical energy / micro-optical devices / fabrication technology / microactuator technology / micro-scale device / micro devices / electronic devices / electronics / Post-processing / optical processing / manufacturing / usable energy / micro total analysis systems / optical applications / fabrication tool / /

Organization

University of Colorado / CU-MEMs Lab / NSF Center for Advanced Manufacturing and Packaging of Microwave / Optical / and Digital Electronics / Mongkut Institute of Technology Ladkrabang / down / Optoelectronic Computing Systems Center / NSF Center for Advanced Manufacturing / King Mongkut Institute of Technology Ladkrabang / /

Person

Y. C. Lee / W. Zhang / J. H. Comtois / Victor M. Bright / Kristina M. Johnson / J. R. Ried / V. M. Bright / D. E. Sene / A. Tuantranont / V / /

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ProvinceOrState

New York / Colorado / /

Technology

design verification / bar code / x-ray / promising technology / Fabrication Technology Batch IC fabrication technology / Microwave / MEMS technology / microelectronics technology / photolithography / same chip / IC fabrication technology / laser / microsystem technology / Lasers / optoelectronics / simulation / DSP / microactuator technology / integrated circuit / CAD / fabricated using integrated circuit / /

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