San Francisco / Medford / Stockholm / Jena / Pittsburgh / Miyazaki / Orlando / New York / Cambridge / Sendai / San Diego / Hilton Head Island / /
Company
Hewlett Packard / Naval Research Laboratory / Ansoft Corporation / Carl Zeiss Jena GmbH / Hewlett-Packard Company / IBM / Robert Bosch GmbH / AT&T Bell Labs / Air Force Research Laboratory / Bell Laboratories / Robert Bosch Corporation / Micro Electro Mechanical Systems / /
Country
Japan / China / Germany / Sweden / United States / /
Currency
USD / / /
Facility
University of Jena / Laboratory of Carnegie Mellon University / Tsinghua University / Beijing Institute of Technology / Institute of Microelectronics / Central Research Center of Carl Zeiss Jena GmbH / Nanoelectronics Processing Facility / University of Tokyo / University of California / Institute of Industrial Science / Carnegie Institute of Technology G.T. Ladd Award / Carnegie Mellon University / North America Research Center of Robert Bosch Corporation / The Robotics Institute / Naval Research Laboratory / University of Hawaii / Tufts University / Massachusetts Institute of Technology / CMOS bridge / /
IndustryTerm
external electronics / imaging / personal technology briefings / few example devices / electronics technology investments / metal / conventional complentary metal / m-wide device / surface-micromachined inertial device / metal mask erosion / silicon-based chemical / interferometric systems / carrier wafer / process development / metal interconnect layers / electronics packaging / clean device / metal layer / complentary metal / electronics / micromechanics processing technology / microfabrication technologies / /
Organization
Defense Advanced Research Projects Agency / Carnegie Institute of Technology G.T. Ladd / Defense Science Board / U.S. Government / Senior Executive Service / Massachusetts Institute of Technology / Beijing Institute of Technology / University of Tokyo in Japan / Carnegie Mellon University / Pittsburgh / North America Research Center of Robert Bosch Corporation / Institute of Microelectronics / National Science Foundation / Electronics Technology Office / University of Jena / MIT / Robotic Systems Research Department / Institute of Industrial Science / Air Force Materiel Command / University of California / Berkeley / Tsinghua University / Beijing / Tufts University / AIME Electronic Materials Society / Robotics Institute / Department of Electrical / University of Hawaii / Central Research Center of Carl Zeiss Jena GmbH / /
Person
Lars Erdmann / R. T. Howe / Island / A. P. Pisano / J. King / John Wiley / G. C. Johnson / J. Gabriel / Gary K. Fedder / Xu Zhu / William Perry / B. E. Boser / P. T. Jones / Ross Tucker / O. Tabata / /
Position
Visiting Scientist / Subject Editor / Professor of Electrical / conductor / Associate Professor / Secretary of Defense / researcher / Deputy Director / Director / King / /
ProgrammingLanguage
FL / /
ProvinceOrState
Hawaii / South Carolina / California / Pennsylvania / Florida / North Carolina / Massachusetts / /
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures