SEMI-FINISHED BONDED SUBSTRATES CONSISTING OF PIEZO- AND PYROELECTRIC LITHIUMTANTALAT AND GLASS Materials - Direct bonding - Document - PDFSEARCH.IO

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	SEMI-FINISHED BONDED SUBSTRATES CONSISTING OF PIEZO- AND PYROELECTRIC LITHIUMTANTALAT AND GLASS Materials Add to Reading List Document Date: 2015-01-16 02:26:59 Open Document File Size: 176,66 KB Share Result on Facebook Country Germany / / / Facility Fraunhofer Institute / / Organization SEMI / Fraunhofer Institute for Electronic / / Person SEMI-FINISHED BONDED SUBSTRATES / Dirk Wuensch / Maik Wiemer / / / Technology Dielectric / / SocialTag Electronics manufacturing Wafer bonding Semiconductor device fabrication Wafer Direct bonding Pyroelectricity Microtechnology Technology Electronics

SEMI-FINISHED BONDED SUBSTRATES CONSISTING OF PIEZO- AND PYROELECTRIC LITHIUMTANTALAT AND GLASS MaterialsAdd to Reading List