| Document Date: 2003-08-07 23:33:00
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City Kobe / Seattle / Washington / Redmond / San Jose / / Company RIE (aperture adjusting etch) HF / / Country Japan / United States / / / Facility University of Washington / / IndustryTerm light valve technology / deformable mirror device / optic data storage devices / low surface-energy / microlens systems / display technologies / lens systems / carrier wafer / chemical polishing / resolution applications / light processing / imaging / optical networks / / NaturalFeature Hilton Head Island / / Organization University of Washington / / Person Island / / Position Head / / Product Acetic Acid / / ProvinceOrState California / Washington / / Technology HDTV / MEMS / heat transfer / lithography / Grating light valve technology / simulation / display technologies / MUMPs chip / / URL http /
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HIGHLY SPACE-EFFICIENT ELECTROSTATIC ZIGZAG TRANSMISSIVE MICRO-OPTIC SWITCHES FOR AN INTEGRATED MEMS OPTICAL DISPLAY SYSTEM Kerwin Wang1, Karl F. Böhringer1, Mike Sinclair2, and Gary Starkweather2 of Washington, Seattle