Micromachinery

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21	PDF Document Add to Reading List Source URL: www.wiley-vch.de Language: English - Date: 2013-04-03 21:06:05 Chemistry Microelectromechanical systems Surface micromachining Microsystem Micromachinery Bulk micromachining Silicon on insulator Silicon Integrated circuit Microtechnology Materials science Technology
22	227 Introduction to Micro-Electro-Mechanical Systems (MEMS) Add to Reading List Source URL: www.nectec.or.th Language: English - Date: 2003-02-18 23:39:28 Microelectromechanical systems Micro-Opto-Electro-Mechanical Systems Deformable mirror Microfabrication Surface micromachining Micromachinery Bulk micromachining Beam steering Microlens Microtechnology Materials science Technology
23	An Introduction to MEMS (Micro-electromechanical Systems) Add to Reading List Source URL: www.lboro.ac.uk Language: English - Date: 2012-11-01 04:16:41 Micro-Opto-Electro-Mechanical Systems Microelectromechanical systems Microfabrication Surface micromachining Micromachinery Microsystem Semiconductor Equipment and Materials International Bio-MEMS RF MEMS Microtechnology Materials science Technology
24	PDF Document Add to Reading List Source URL: www.sandia.gov Language: English - Date: 2007-08-27 10:25:49 Sandia National Laboratories Computing Computer hardware Sandia New Mexico Stockpile stewardship Albuquerque New Mexico Micromachinery Novint Livermore California United States Department of Energy National Laboratories Lockheed Martin