gas flow rates / data storage devices / near-field optical applications / micro-opto-electro-mechanical systems / mass production technologies / time-multiplexed plasma-etching technology / physical and chemical etching / /
Organization
University of Washington Seattle / Karl F. Böhringer Electrical Engineering Department / /
Person
Y. C.Lai / V / Washington Seattle / Karl F. Böhringer / / /
Position
candidate for MOEMS applications / Optical Head / read-head / /
Technology
time-multiplexed plasma-etching technology / mass production technologies / /
TIME-MULTIPLEXED-PLASMA-ETCHING OF HIGH NUMERICAL APERTURE PARABOLOIDAL MICROMIRROR ARRAYS Kerwin Wang, Karl F. Böhringer Electrical Engineering Department, University of Washington Seattle, WA[removed]Phone[removed]