Production Technologies for Mass-production Pioneering Development of Immersion Lithography UCHIYAMA Takayuki Abstract NEC Electronics has pioneered the development of the immersion lithography technology in order to de

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Date: 2012-09-11 09:28:37 Extreme ultraviolet lithography Multiple patterning Resist Semiconductor device fabrication Lithography 32 nanometer Solid immersion lens Photolithography Stepper Materials science Technology Immersion lithography		Production Technologies for Mass-production Pioneering Development of Immersion Lithography UCHIYAMA Takayuki Abstract NEC Electronics has pioneered the development of the immersion lithography technology in order to de Add to Reading List Source URL: www.nec.com Download Document from Source Website File Size: 736,90 KB Share Document on Facebook

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