Nanoimprint lithography

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91	NOVEL APPROACH TO PRODUCE NANOPATTERNED TITANIUM IMPLANTS BY COMBINING NANOIMPRINT LITHOGRAPHY AND REACTIVE ION ETCHING. Add to Reading List Source URL: www.rsc.org Language: English - Date: 2010-08-27 05:33:00 Technology Microelectromechanical systems Nanoimprint lithography Etching Deep reactive-ion etching Reactive-ion etching Nanolithography 16 nanometer 11 nanometer Materials science Microtechnology Semiconductor device fabrication
92	A facility within the Nanometer Structure Consortium (nmC) at Lund University lund Add to Reading List Source URL: www.nano.lth.se Language: English - Date: 2012-10-23 01:27:25 Thin film deposition Technology Nanoelectronics Nanowire Nanoimprint lithography Epitaxy Focused ion beam Nanolithography Vapor–liquid–solid method Semiconductor device fabrication Materials science Nanotechnology
93	PDF Document Add to Reading List Source URL: braungroup.beckman.illinois.edu Language: English - Date: 2012-04-17 15:04:17 Technology Etching Microelectromechanical systems Wafer RF MEMS Photoresist Integrated circuit Deep reactive-ion etching Nanoimprint lithography Materials science Semiconductor device fabrication Microtechnology