Off-axis illumination

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#Item
1Chemistry / Laboratory techniques / Phase-shift mask / Microscopy / Refractive index / Off-axis illumination / Diffraction / Image scanner / Physics / Optics / Science

Novel solution for in-die phase control under scanner equivalent optical settings for 45nm node and below Sascha Perlitz*, Ute Buttgereit*, Thomas Scherübl*, Dirk Seidel*

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Source URL: www.zeiss.com

Language: English - Date: 2010-10-16 20:08:49
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