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Chemistry / Etching / RCA clean / Buffered oxide etch / Wafer / Piranha solution / Photoresist / Plasma etching / Chemical vapor deposition / Semiconductor device fabrication / Materials science / Microtechnology
Date: 1999-12-02 13:39:32
Chemistry
Etching
RCA clean
Buffered oxide etch
Wafer
Piranha solution
Photoresist
Plasma etching
Chemical vapor deposition
Semiconductor device fabrication
Materials science
Microtechnology

Surface Cleaning and Wet Processing Terminology Contributions by Motorola Corporation

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