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Date: 1999-12-02 13:39:32Chemistry Etching RCA clean Buffered oxide etch Wafer Piranha solution Photoresist Plasma etching Chemical vapor deposition Semiconductor device fabrication Materials science Microtechnology | Surface Cleaning and Wet Processing Terminology Contributions by Motorola CorporationAdd to Reading ListSource URL: www.erc.arizona.eduDownload Document from Source WebsiteFile Size: 33,00 KBShare Document on Facebook |