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Buffered oxide etch
Results: 6

#	Item
1	High-Aspect Ratio Deep Sub-Micron α-Si Gate Etch Process Control H.-M. Park, T. L. Brock, D. Grimard, J. W. Grizzle and F. L. Terry, Jr University of Michigan 195th Spring Meeting of ECS Add to Reading List Source URL: web.eecs.umich.edu Language: English - Date: 2016-04-25 13:15:12 Semiconductor device fabrication Microtechnology Etching Plasma processing Chemical milling Isotropic etching Plasma etching Microelectromechanical systems Buffered oxide etch
2	PDF Document Add to Reading List Source URL: cnl.colorado.edu Language: English - Date: 2003-11-27 01:18:56 Fluorine Buffered oxide etch Corrosive substance Hydrogen fluoride Chemical burn Ammonia Sulfuric acid Ammonium fluoride Calcium fluoride Chemistry Fluorides Hydrofluoric acid
3	Chapter[removed]Miscellaneous Etchants Add to Reading List Source URL: nanolab.berkeley.edu Language: English - Date: 2010-09-17 15:08:49 Mineral acids Microtechnology Buffered oxide etch Ethylenediamine pyrocatechol Tetramethylammonium hydroxide Hydrogen chloride Industrial etching Nitric acid Iron(III) chloride Chemistry Etching Chlorides
4	Chapter[removed]VLSI Etchants Add to Reading List Source URL: nanolab.berkeley.edu Language: English - Date: 2011-08-05 15:10:22 Technology Etching Plasma processing Microelectromechanical systems Tetramethylammonium hydroxide Buffered oxide etch Plasma etcher Plasma etching Photoresist Materials science Semiconductor device fabrication Microtechnology
5	Surface Cleaning and Wet Processing Terminology Contributions by Motorola Corporation Add to Reading List Source URL: www.erc.arizona.edu Language: English - Date: 1999-12-02 13:39:32 Chemistry Etching RCA clean Buffered oxide etch Wafer Piranha solution Photoresist Plasma etching Chemical vapor deposition Semiconductor device fabrication Materials science Microtechnology
6	[removed]Yield Enhancement of Wineglass Contact Process Using QYield George Belezos, IXYS Integrated Circuits Division, Beverly, MA Abstract Add to Reading List Source URL: www.quadrillion.com Language: English - Date: 2012-09-18 15:05:13 Technology Wafer Buffered oxide etch Stepper Photoresist Plasma etching Etching Semiconductor device fabrication Materials science Microtechnology