Surface micromachining - Document - PDFSEARCH.IO

First Page		Document Content
Microtechnology Technology Plasma processing Nanotechnology Thin film deposition Microelectromechanical systems Etching Chemical vapor deposition Surface micromachining Materials science Chemistry Semiconductor device fabrication		Add to Reading List Source URL: microlab.berkeley.edu Download Document from Source Website File Size: 1,03 MB Share Document on Facebook

	Monolithic fabrication of millimeter-scale machines DocID: 1fUva - View Document
	VTT MEMSFAB LTD Contract manufacturing of micro- and nanoelectronic devices VTT Memsfab Ltd carries out commercial production of microelectromechanical systems (MEMS) and other micro- and nanoelectronic devices. The com DocID: 11x24 - View Document
	Surface Micromachining An IC-Compatible Sensor Technology Bernhard E. Boser Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley DocID: 1129c - View Document
	Sensors 2007, 7, [removed]sensors ISSN[removed] © 2007 by MDPI www.mdpi.org/sensors DocID: RSVQ - View Document
	POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES Huikai Xie, Lars Erdmann, Xu Zhu, Kaigham J. Gabriel† and Gary K. Fedder† Department of Electrical and Computer Engineering and † DocID: Rc9s - View Document