227 Introduction to Micro-Electro-Mechanical Systems (MEMS)

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Date: 2003-02-18 23:39:28 Microelectromechanical systems Micro-Opto-Electro-Mechanical Systems Deformable mirror Microfabrication Surface micromachining Micromachinery Bulk micromachining Beam steering Microlens Microtechnology Materials science Technology		227 Introduction to Micro-Electro-Mechanical Systems (MEMS) Add to Reading List Source URL: www.nectec.or.th Download Document from Source Website File Size: 1,46 MB Share Document on Facebook

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