process technologies / metal / chemical etching / electronics / chemical reactions / metal line / manufacturing / metal interconnection / chemical and mechanical effects / process technology / metal deposition / chemical and mechanical forces / /
MusicGroup
Device / Process / /
Organization
Process Technology Division / Institute of Microelectronics / MIT / /
Person
Shyam P. Murarka / Taber Hardesty Smith / Joseph M. Steigerwald / Wang Zhengfeng / Ronald J. Gurmann / /
Technology
semiconductor / Chemical Mechanical Polishing / laser / process technologies / MEMS / enabling technology / Chip Design / 3-D / process technology / Process Control / photolithography / CMP technology / dielectric / CMP / /