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Electronics manufacturing / Wafer bonding / Semiconductor device fabrication / Wafer / Chemical bonding / Anodic bonding / Direct bonding / 100 micrometres / Microelectromechanical systems / Microtechnology / Electronics / Technology
Date: 2015-01-15 06:53:22
Electronics manufacturing
Wafer bonding
Semiconductor device fabrication
Wafer
Chemical bonding
Anodic bonding
Direct bonding
100 micrometres
Microelectromechanical systems
Microtechnology
Electronics
Technology

SEMI-FINISHED BONDED SUBSTRATES: SILICON ON GLASS (SOG) µm up. The precise specifications of each Contact

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Source URL: www.enas.fraunhofer.de

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